8 - 11 September 2026
Monterey, California, US

SPIE Photomask Technology + EUV Lithography Program

Join your community in September for a packed week of conferences, posters, special events, and an exhibition.

Building the 2026 program

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Be sure to view the conference topics, submit an abstract, and become part of this amazing program.

Share your work

Browse the call for papers

View the call for each conference


Search icon Photomask Technology Photomask Technology ...
Search icon Extreme Ultraviolet Lithography Extreme Ultraviolet Lithography ...

Students: connect and learn

Explore the opportunities to help you learn more about the photomask technology and EUVL communities. Look for financial support options to attend the conference, awards to help you stand out, and special events to help you network.

Stay connected


Mail icon: Sign up for emails to stay informed about SPIE Photomask Technology and Extreme Ultraviolet Lithography Sign up for emails Sign up for emails ...
Phone icon: Find the SPIE app that keeps you connected to Photomask Technology and Extreme Ultraviolet Lithography Get the conference app Get the conference app ...