8 - 11 September 2026
Monterey, California, US

SPIE Photomask Technology + EUVL Registration Information

Find the details you need to register for the 2026 event in Monterey

Register now for the 2026 conference and free exhibition


To pay via credit card or PayPal:

Register online


If you:

  • need to pay via bank transfer
  • need an invoice for payment
  • are an Administrator registering one or more people

Complete the Registration Form PDF and return to Customerservice@spie.org

Refund information


There is a $75 USD service charge for processing refunds for conference or course registrations. Requests for refunds or course transfers must be received by 21 August 2026; all registration fees will be forfeited after this date. Membership dues and special events are not refundable.

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Registration fees in US dollars


Prices increase $170 after 21 August 2026. All online charges are made in US dollars.

NOTE: Join as an SPIE Member to save more than the cost of an annual Membership with a single event registration. Purchase your Membership during check-out.


Purchase Membership and save!
SPIE Member  Non-Member 
Speaker or author, program committee, session chair $1,050 $1,240
Non-author attendee $1,050 $1,240
Student $590 $1,240
Booth staff (must be with exhibiting company) Free Free
Exhibition visitor Free Free

What is included with registration


             Technical program Exhibition booth staff Exhibition visitor
All presentations, plenaries, and special events
50 proceedings downloads*
Lunches
Annual "Gala" Reception**
Exhibition

*Proceedings are fully published on the SPIE Digital Library by six weeks after the event; SPIE will email notification and instructions at this time.

**Guest admission tickets for the Annual Gala at Portola can be purchased onsite at the Cashier for $125.

Course registration


Courses are priced separately.

  • Course-only registration includes your selected course(s), course notes, coffee breaks, and admittance to the exhibition
  • Course prices increase 15% after the deadline (21 August 2026)
  • Onsite, please go to the course materials pickup after you pick up your badge
  • Allow yourself enough time to register, pick up your materials, and get to your course

Exhibition registration


  • Exhibition visitor registration is free, but you must register.
  • The Exhibition is open Tuesday 10:00 AM - 4:00 PM, Wednesday 9:30 AM - 4:00 PM.

SPIE Membership discounts


SPIE Members receive conference and course registration discounts, which are applied at the time of registration. SPIE Student Members receive even greater discounts on courses, particularly during early registration.

SPIE Student Member registration rates are available only to undergraduate and graduate students who have not yet received their PhD or MD. Post-docs may not join SPIE as a Student Member.

Not an SPIE Member? Purchase Membership with your registration and receive your discounts right away. Or contact membership@spie.org for more information.

All students are encouraged to take advantage of available grant and scholarship opportunities. 

Learn about student grants

Press registration


US Government credit cards


US Government credit card users: have your purchasing officer contact the credit card company and get prior authorization before attempting to register. Advise your purchasing agent that SPIE is considered a 8398 company for authorization purposes.

Contact SPIE Customer Service


Email: customerservice@spie.org
Phone: +1 360 676 3290 or +1 888 504 8171
Fax: +1 360 647 1445

Hours of operation:
8:00 AM–5:00 PM PT, Monday–Friday

Universal time:
15:00–01:00 November–March
14:00–00:00 April–October