Scenic view of Bixby Creek Bridge along the rugged Big Sur coastline near Monterey, California, with steep cliffs, green hills, and the deep blue Pacific Ocean under a clear sky.

Panoramic view of Bixby Creek Bridge along the rugged Big Sur coastline near Monterey, California, with steep cliffs, green hills, and the deep blue Pacific Ocean under a clear sky.

SPIE Photomask Technology + Extreme Ultraviolet Lithography

Share your research and join the outstanding program for 2026

Make plans to join the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies.

Submit an abstract and present your research in Monterey in September. The call for paper is now open.

#SPIEPhotomaskEUV

Request an invitation letter early

Be sure to plan ahead. If you will be traveling to the event from outside the US, we encourage you to start processing your paperwork early. Request an invitation letter and apply for a visa, if needed.

Hans Stiepan from Carl Zeiss SMS

Did you miss the last quarterly BACUS webinar?

Watch the recording to gain an overview of the mask-making process, focusing on the metrology steps. Hans Stiepan from Carl Zeiss SMS explains critical mask parameters, with particular attention to advanced extreme ultraviolet (EUV) masks, and discusses their impact on the lithography process.

Sign in to or create a free SPIE account to view all past webinar recordings from the photomask and lithography community.

Learn more

Present your research: view important information

Abstract submission details Abstract submission details

Presenter information Presenter information

Don't miss the exhibition

The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.

exhibition booths at Photomask Technology and Extreme Ultraviolet Lithography

Attention students

Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and grants for students — learn how to attend for free in 2026!

View the award recipients

See the accomplishments

Award recipients from SPIE Photomask Technology + Extreme Ultraviolet Lithography gain the recognition they deserve. Celebrate the important work being done and further help the industry support student participation. View previous recipients; this year's recipients will be shared soon.