View of downtown San Jose at sunset, featuring glass and concrete office towers, quiet city streets lined with fall foliage, and the Santa Clara Valley hills in the distance.

Wide panoramic view of downtown San Jose at sunset, featuring glass and concrete office towers, quiet city streets lined with fall foliage, and the Santa Clara Valley hills in the distance.

SPIE Advanced Lithography + Patterning

The event for emerging technology in the semiconductor industry

Join us for another great event in San Jose in February

Participate in this annual symposium where leading researchers are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. Hear new research, challenges, and breakthroughs with your community once again in 2027.

The call for papers opens in June.

#SPIElitho

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Explore six great conferences

Optical and EUV Nanolithography
DTCO and Computational Patterning
Metrology, Inspection, and Process Control
Novel Patterning Technologies
Advances in Patterning Materials and Processes
Advanced Etch Technology and Process Integration for Nanopatterning

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and get business done. Find these technology solutions and more:
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Two people engage with a touchscreen at a tech exhibition. One person gestures toward the screen while explaining something to the other, both wearing lanyards. Behind them are booths with banners in a busy indoor venue.

Student opportunities at the semiconductor conference

Students: learn how to attend this event for free

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage with and learn about the semiconductor industry, as well as share their latest research in lithography and photomask technologies. Leading companies support student participation through grants and awards, and tech groups offer scholarships for graduate and undergraduate applicants.

Two people talking at a table, one with a laptop, the other holding a cup and papers, against a blue background

SPIE Advanced Lithography + Patterning

Join us for another great event in San Jose in February

View highlights from 2026 event View highlights from 2026 event

Download 2026 program Download 2026 program

Explore six great conferences

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

Student opportunities at the semiconductor conference

Students: learn how to attend this event for free

Stay involved

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