Advanced Lithography + Patterning Program

Make plans to be part of the event by sharing your research

Person in a suit presenting with a laptop and remote, standing in front of gray and black curtains.

Make plans to attend

Every year, this vibrant community gathers to exchange ideas, explore the latest research, discover groundbreaking innovations, and strengthen professional connections. Join your community in San Jose in February 2027!

View the 2026 program

Download Program PDF

Technologies and applications

Extreme ultraviolet (EUV) lithography
Novel patterning technologies: semiconductors, MEMS, NEMS, MOEMS
Metrology, inspection, and process control for microlithography
Advances in patterning materials and processes; optical microlithography
Design-process-technology co-optimization for manufacturability
Advanced etch technology and process integration for nanopatterning

Close-up of a colorful microprocessor die showing intricate circuitry patterns as an example of lithography.

Putting focus on topical areas with application tracks
Application tracks list presentations on a topical area with broad-range interest so that participants can easily locate presentations in their area of interest. In the 2026 program, these topics will include AI/ML, sustainability, stochastics, advanced packaging, and EPE/Overlay. Learn more

Featured events and career training

Attendees enjoying a networking event at SPIE Advanced Lithography + Patterning

Special events

Sessions feature speakers presentating on a wide range of optical sciences topics. Join colleagues as you learn, connect, and network.

Courses

Take courses on topics that align with lithography, processing, and fabrication. A valuable investment for your career.