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21 - 25 February 2027
21 - 25 February 2027
San Jose, California, US

Abstract Submission Guidelines

Present your research at SPIE Advanced Lithography + Patterning

Review the how-to guide for successful abstract submission below, including the submission agreement and publication of Proceedings in the SPIE Digital Library. Submissions are subject to review and approval by conference chairs/committee and must be received by the deadline for priority placement. Some conferences may consider post-deadline abstracts. View individual conference page for more information.

Request an invitation letter early

Be sure to plan ahead. If you will be traveling to the event from outside the US, we encourage you to start processing your paperwork early.

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Important dates


Abstracts due 9 September 2026
Registration open November 2026
Authors notified and program posts online 16 November 2026
Student Grant applications due 21 November 2026
Submission system opens for manuscripts and poster PDFs* 21 December 2026
Poster PDFs due for spie.org preview and publication 27 January 2027
All manuscripts due 3 February 2027
Advance upload deadline for oral presentation slides** 19 February 2027

*Contact author or speaker must register prior to uploading
**After this date slides must be uploaded onsite at Speaker Check-In

Guide for successful abstract submission


What you need to submit:

  • Presentation title
  • Author(s) information
  • Speaker biography (1000-character max including spaces)
  • Abstract for technical review (200-300 words; text only)
  • Summary of abstract for display in the program (50-150 words; text only)
  • Extended abstract PDF document limited to two pages maximum, including tables and figures. Include author names and affiliations; text; any figures, tables, or images; and sufficient data for committee review
  • Keywords to be used when searching for your paper (optional)

Note: Only original material should be submitted. Commercial papers, papers with no new research/development content, and papers with proprietary restrictions will not be accepted for presentation.


How to submit your abstract:

  • Browse the conference topics
  • Choose one conference that most closely matches your abstract topic. You may submit more than one abstract, but submit each only once
  • Click the title of a conference to view the full description and submit by clicking the "Submit An Abstract" button
  • Sign in to your SPIE account or create an account if you do not already have one
  • Follow the steps in the submission wizard until the process is completed


Application tracks

An application track is a grouping of presentations on a topic of interest across all conferences. During submission of an abstract, the submitting author should select an application track if it is relevant to their research.

  • AI/ML: Papers that highlight the use of artificial intelligence, machine learning, and deep learning to create and implement intelligent systems across multiple sectors, technologies, and applications.
  • Sustainability: Papers that highlight the use of optics and photonics for renewable energy, natural resource management, sustainable manufacturing, and greenhouse gas mitigation in support of the UN's Sustainable Development Goals.
  • Stochastics: Papers related to Line Edge Roughness (LER), Line Width Roughness (LWR), photon and secondary electron stochastics, chemical and process nonuniformity.
  • Advanced Packaging: The interconnection of multiple integrated devices, including electronic, photonic, and/or MEMS, to be packaged as a single component. Advanced packaging achieves performance gains through the integration of several devices in one package, driving heterogenous integration and chiplet architectures.
  • EPE/Overlay: Papers related to overlay, CD, and Edge Placement Error (EPE), characterization and metrology, root cause analysis, and process improvements.


Submission agreement

All presenting authors, including keynote, invited, oral, and poster presenters, agree to the following by submitting an abstract:

  • They will register and pay the conference registration fee
  • They will recieve emails about the conference series
  • Oral presenters: it is okay to record and publish on-site presentations (slides synched with voice) in the conference proceedings in the SPIE Digital Library
  • Poster presenters: they will not present more than two posters in a poster session; they submit a poster PDF for preview in the online program (web and app) and for publication in the conference proceedings in the SPIE Digital Library
  • They will submit a manuscript by the advertised due date for publication in the conference proceedings in the SPIE Digital Library
  • They will obtain funding for registration fees, travel, and accommodations
  • They will attend the meeting
  • They will present at the scheduled time


Student author attendees under 18 years of age

In addition to the submission agreement above, the following requirements apply to student presenters and coauthors who will be under 18 years of age on the first day of the event they are attending:

  • Students under 18 years of age must be actively affiliated with a recognized academic institution
  • Students must have their abstract proposal approved by a faculty advisor or mentor before submission; this advisor or mentor must also be listed as a co-author on both the abstract and the final manuscript submitted for publication in the Proceedings of SPIE
  • If a submission is accepted for presentation, the student's parent or guardian must complete and submit the Parental/Guardian Consent Form by 8 weeks before the event start date
  • All student authors under age 18 must be accompanied to the event by a faculty advisor, parent, or guardian


Review and program placement

  • To ensure a high-quality conference, all submissions will be assessed by the conference chair/editor for technical merit and suitability of content
  • Conference chairs/editors and/or SPIE staff reserve the right to reject any paper that does not meet content or presentation expectations
  • Final placement in an oral or poster session is subject to chair discretion


Publication of conference proceedings in the SPIE Digital Library

Increase your professional visibility and get publishd in the world's largest collection of optics and photonics research. Your peers access approximately 18 million papers, presentations, and posters from the SPIE Digital Library each year.

  • Only manuscripts, presentations, and posters presented at the conference and which abide by publication guidelines and due dates will be published in the conference proceedings in the SPIE Digital Library
  • Manuscripts, presentations, and posters will be officially published after the event
  • Conference chairs/editors or SPIE staff may require revision before approving publication and reserve the right to reject any manuscript or presentation that does not meet acceptable standards for a scientific publication
  • The conference chair/editor and/or SPIE staff decision to accept or reject a manuscript, presentation, or poster for publication is final
  • Authors must be authorized to provide a suitable publication license to SPIE; authors retain copyright of all scientific material
  • Authors must be able to confirm that all clearances, authorizations, and licenses needed for submission and publication of this paper have been obtained and all reused work is properly cited
  • SPIE retains rights to distribute and market the official recording of the presentation and/or submitted poster
  • SPIE partners with relevant scientific databases and indexes to enable researchers to easily find papers published in the Proceedings of SPIE. The databases that abstract and index these papers include Astrophysical Data System (ADS), Ei Compendex, CrossRef, Google Scholar, Inspec, Scopus, and Web of Science
  • More publication information is available in the SPIE Digital Library


Contact information

Questions? Contact the SPIE staff coordinator listed in your spie.org account.

For questions about the event, program, your presentation, and/or submitting an abstract, contact your conference program coordinator.

For questions about submission to and publication on the SPIE Digital Library, contact your proceedings coordinator.