Paper 14085-25
Paper 14085-25
Optimization and upscaling of microlens arrays for advanced photon detectors
15 April 2026 • 13:30 - 13:50 CEST | Luxembourg/Salon 2 (Niveau/Level 0)
Abstract
Microlens arrays (MLAs) enhance light collection in photon detectors by redirecting incident light to active pixel areas, improving the pixel fill factor and thus the external quantum efficiency. We present recent advancements in MLA optimization and integration for SPADs, SiPMs, and even PICs, addressing diverse substrates and broad optical ranges. A key innovation is the upscaling of MLA fabrication to 200 mm wafers and support for multi-project wafers (MPW), enabling cost-efficient prototyping and industrial compatibility. These capabilities are offered through CSEM’s MLA foundry services, providing design, mastering, and wafer-level replication for next-generation detectors in applications from life sciences to high-energy physics.
Presenter
Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Frédéric Zanella is Project Manager at CSEM SA, Switzerland. He earned a joint M.S. in Micro and Nano-technologies for Integrated Systems from Grenoble INP (France), Politecnico di Torino (Italy), and EPFL (Switzerland) in 2009, followed by a Ph.D. from EPFL in 2014 on organic thin-film transistors. His work on organic TFT design and modeling earned an Outstanding Paper Award (MIXDES 2011) and Best Poster Prize (ICOE 2013). Since 2014, he has led projects at CSEM in printed electronics and micro/nano-optics for industries including near-eye displays, watchmaking, and photon/image sensing for space. Since 2017, he focuses on pixel-level microlens array replication for imagers such as SPADs, managing CSEM’s on-chip microlens engineering and foundry services.