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12 - 16 April 2026
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Conference 14090 > Paper 14090-12
Paper 14090-12

MOEMS-based EC-QCLs: Automated module assembly and multicore modules

13 April 2026 • 11:50 - 12:10 CEST | Leicester/Salon 12 (Niveau/Level 1)

Abstract

The mid-infrared spectral region hosts fundamental molecular vibrations, enabling label-free chemical detection. Wavelength-tunable quantum cascade lasers (QCLs) suit mid-IR spectroscopy with high power, high spectral resolution, small footprints, and excellent beam quality. Integrating QCLs with MOEMS grating scanners in external cavities yields compact, rugged modules with exceptional tuning speed and broad spectral coverage. Merging QCLs with MOEMS grating scanners in an external cavity provides very compact, rugged modules. In this contribution, we will give an overview of our current efforts towards automated assembly of our resonant MOEMS-EC QCL modules, simplifying the assembly process and making it more suitable for volume production at reduced costs. Furthermore, we showcase a four-core module, in which we combine four broadband resonant MOEMS-EC-QCLs into a single output beam and are able to measure the combined IR spectrum of all lasers in only 0.5ms.

Presenter

Fraunhofer-Institut für Angewandte Festkörperphysik IAF (Germany)
Marko Haertelt received the Diploma and Ph.D. degrees in physics from Technische Universität Berlin, Berlin, Germany, in 2008 and 2012, respectively. From 2008 to 2012, he worked as a Research Assistant with Fritz-Haber-Institute, Max-Planck-Society, Berlin, focusing on gas-phase infrared spectroscopy of clusters using infrared free electron lasers. From 2012 to 2015, he worked as a Postdoctoral Fellow with Joint Attosecond Science Laboratory, University of Ottawa, Ottawa, ON, Canada; and the National Research Council of Canada, Ottawa, where he studied the strong-field photoelectron holography of homonuclear and heteronuclear molecules. He joined the Fraunhofer IAF, Freiburg im Breisgau, Germany, as a Researcher, in 2016, and became a Group Leader the same year. His research is currently focusing on laser source and application development for micro-opto-electromechanical system (MOEMS)-external cavity quantum cascade lasers (EC-QCLs).
Presenter/Author
Fraunhofer-Institut für Angewandte Festkörperphysik IAF (Germany)
Author
Christian Schilling
Fraunhofer-Institut für Angewandte Festkörperphysik IAF (Germany)
Author
Fraunhofer-Institut für Angewandte Festkörperphysik IAF (Germany)
Author
Fraunhofer-Institut für Angewandte Festkörperphysik IAF (Germany)
Author
Fraunhofer-Institut für Angewandte Festkörperphysik IAF (Germany)
Author
Markus Schwarzenberg
Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)
Author
Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)
Author
Andre Dreyhaupt
Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)