Holographic laser microfabrication with interferometric measurement of the processed structure

Material ablation using ultrashort-pulse lasers enables highly precise microfabrication of a wide range of materials and is widely used in the production of electronic components, mechanical parts, and medical devices. As a result, ultrashort-pulse laser processing is expected to play a key role in achieving mass customization in future manufacturing. In this study, to achieve faster and more accurate laser microfabrication, we demonstrate holographic laser processing combined with interferometric measurement of the processed structure. The measurement results are fed back into the holographic beam-shaping, enabling the fabricated structure to converge toward the desired target profile.