Paper 14093-77
Paper 14093-77
3D microfabrication of transparent thremoset polymer using a conventional nanosecond laser-induced bubble
On demand | Presented live 15 April 2026 
Abstract
We have developed a technique for microfabrication of the thermoset polymer polydimethylsiloxane (PDMS) using a conventional nanosecond laser-induced bubble, termed microFLIB. In the 2D microFLIB process, microgrooves with hemispherical cross-sections can be fabricated on the PDMS surface. Furthermore, metal films can be selectively deposited along these grooves through subsequent electroless plating. In the 3D microFLIB process, hollow microfluidic channels can be embedded within the PDMS substrate. In addition, through-holes with high aspect ratios exceeding 200 can be fabricated by a single laser scanning. The developed microFLIB technique enables high-speed and high-quality microfabrication of PDMS, offering great potential for applications in microfluidic and biochip devices.
Presenter
Hirosaki Univ. (Japan)
Yasutaka Hanada received his B.E., M.E. and Ph.D degrees in electronics from Tokyo Univ. of Science in 2001, 2003 and 2006 respectively. He moved to RIKEN (The Institute of Physical and Chemical Research) when he was a Ph.D student, and then, became a special postdoctoral researcher. In 2019, He became a professor in Hirosaki University. He has been working on the laser microfabrication of transparent materials and is currently working on the 3-D microchip fabrication using laser-induced bubble for biochip applications.
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