Fluence Technology

Femtosecond laser is a powerful tool for fabrication of microstructures in various substrates used in electronics manufacturing. We demonstrate the optimisation of the percussion drilling process for creating high-quality vias in glass and a wide bandgap semiconductor 4H-SiC. Remarkably, our results show excellent performance of repetitive single pulse drilling in glass with possibility to obtain high aspect ratio through glass via (TGV) with minimized taper and shiny walls. We show the influence of pulse repetition rate, pulse energy and pulse duration on the drilling process. On the other hand, superior performance 4H-SiC drilling was obtained using MHz bursts of pulses with the duration below 270 fs. The burst mode is an enabling factor for defect-free processing of 4H-SiC and boosting the drilling throughput. We demonstrate how tuning the burst length allows for increasing the throughput without compromising the spatial resolution and quality of the microstructures. Drilling of Si and 4H-SiC with full laser power of 30 W at 100 kHz repetition rate will be demonstrated. Experiments were performed at Fluence Ultrafast Laser Application Laboratory using Jasper X1 femtosecond fiber laser operating at 1030 nm.

In this study, we demonstrate the capability of femtosecond laser surface engineering to generate precise micro- and nanostructures that fundamentally alter the wetting and optical properties of glass surfaces. By inducing spatially-selective superhydrophilicity, we achieve stable anti-fogging performance. Furthermore, the formation of laser-induced periodic surface structures (LIPSS) creates a gradient refractive index layer, delivering wideband antireflective performance. In particular, we focus on obtaining high spatial frequency LIPSS on pure glass substrates. We investigate the influence of laser parameters on the morphology and uniformity of nanostructures. We show the reflectance spectra of the laser-textured glass. We discuss the industrial scalability of this process, highlighting the necessity of stable femtosecond laser sources to ensure uniformity across large areas. This dry, contactless, and chemically free method enables scalable, spatially selective patterning and provides a sustainable strategy for anti-fog and anti-reflective glass in various applications. The results were obtained using a laser source delivering 200 μJ, <270 fs pulses at 1030 nm. (Jasper X1, Fluence Technology, Poland).