Dr. Tao Shen

Individual Member | Optical Engineer at Focuslight Switzerland
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 3.0 years
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: Micro-optics, Microfabrication, EUV & Soft X-ray metrology, EUV reflectometry & scatterometry
Contact Details:
Sign In to send a private message or view contact details

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Create an SPIE account